Flux Cleaner (Die Form)

Designed for 2.5D and 3D packaging processes, this system is used for flux cleaning. DIW (deionized water) can be used throughout the entire process. The tilt angles of the spray head (XYZ axes) and the Boat base plate can be adjusted according to process requirements, enabling precise cleaning of gaps to enhance productivity. Fully automated cleaning can also be configured.

Functionality & Specifications

Cleaning Chamber / Chemical Supply System

Boat Identification & Transfer

Safety Inspection

Standard Configuration:
3-axis programmable arm movement
Programmable adjustable nozzle angles
4 single-row nozzles
Filtration system
Temperature control system
Automatic DIW / chemical refill system
Low DIW / chemical level warning
CO₂ bubbler

Optional Configuration:
Expandable nozzle rows (per-row unit)
Chemical mixing system
Chemical reclaim system
Chemical heating system
Flexible tank configuration
DIW / chemical recycling circulation system

Standard Configuration:
Manual loading
2D barcode reader
RFID reader
EFEM

Optional Configuration:

Standard Configuration:
Class 100
SEMI certified
Comprehensive abnormality detection
Door interlock sensor
Leak detection