Flux Cleaner (Wafer Form)

Suitable for advanced packaging wafer cleaning processes. As technology continues to advance, chips are increasing in size while feature gaps are becoming narrower. Semtek utilizes nano-atomizing nozzles combined with a matrix cleaning approach to perform both high-pressure and atomized cleaning, customized for different products and gap dimensions. The system also allows for enhanced localized cleaning performance based on specific process requirements.

Functionality & Specifications

Cleaning Chamber / Chemical Supply System

Wafer Identification & Transfer Standard

Safety Inspection

Standard Configuration:
3-axis programmable arm movement
Adjustable nozzle angles
4 single-row spray nozzles
Filtration system
Temperature control system
Automatic DIW/chemical refill system
Low DIW/chemical level alert
CO2 bubbler

Optional Configuration:
Chemical reclaim system
Configurable number of tanks
DIW recycling circulation system

Standard Configuration:
Manual loading







Optional Configuration:
Wafer missing detection
2D barcode reader
EFEM (Equipment Front-End Module)

Standard Configuration:
Class 100
SEMI certified
Door interlock sensors
Leak detection
Cleanliness level control



Optional Configuration:
Upgradable to Class 2
Fire protection system

Experimental Results