Metal Lift Off

Designed for removing metals and photoresist from wafers. A nano‑scale, high‑pressure atomizing nozzle breaks the cleaning solution into ultra‑fine droplets, enabling rapid reaction with the photoresist. Simply rotate‑rinse to strip away both metal and photoresist; once dissolved, the photoresist becomes floating particles that are spun off the wafer by centrifugal force. The patented nozzle can be tuned for different processes and requirements, allowing intensified rinsing on specific target areas.

Functionality & Specifications

Cleaning Chamber / Chemical Supply System

Wafer Identification & Transfer Standard

Safety Inspection

Standard Configuration:
Maximum rotation speed: 3000 rpm
Process chemicals: Organic / Acid / Alkaline
Manual adjustment of spray nozzle angle
Programmable X-axis movement of swing arm
Automatic chemical refill system
Chemical low-level warning
Filtration system
Water resistivity meter

Optional Configuration:
Filter replacement detection system
Ultrasonic soaking system
Chemical recycling system
Temperature control system
CO₂ Bubbler

Standard Configuration:
Maximum rotation speed: 3000 rpm
Process chemicals: Organic / Acid / Alkaline
Manual adjustment of spray nozzle angle
Programmable X-axis movement of swing arm
Automatic chemical refill system
Chemical low-level warning
Filtration system
Water resistivity meter

Optional Configuration:
Wafer thickness <200 μm or >750 μm
Wafer warpage: ±6 mm
OCR system

Standard Configuration:
Class 100 cleanroom compliance
SEMI certified
Magnetic reed switch on access doors
Leak detection system
Cleanroom-grade components






Optional Configuration:
Up to Class 2 cleanroom compliance
Hazardous gas detectors
Co2 fire suppression system
SECS/GEM interface

Experimental Results