Wet Etcher

Designed for wet etching processes to remove excess thin films on wafers. The nano-level atomizing nozzles, combined with our patented orbital-rotational technology, accelerate chemical reactions, enable precise control of chemical direction, reduce chemical usage, and enhance etching uniformity and throughput while minimizing side etching.Multiple chemical nozzles and customized chemical supply / acid-mixing systems can be configured based on customer process requirements.

Functionality & Specifications

Cleaning Chamber / Chemical Supply System

Wafer Identification & Transfer

Safety Inspection

Standard Configuration:
Programmable center shaft speed
Process chemicals: Organic / Acid / Alkaline
Raw chemical level alert
Filtration system
Resistivity meter


Optional Configuration:
Programmable spin speed (rotation)
Programmable orbital speed (revolution)
Chemical temperature control system
Chemical reclaim system
Resistivity control system
Acid mixing system

Standard Configuration:
Wafer thickness: 200–750 µm
Wafer warpage: <±0.5 mm
Wafer center aligner
ESD protection
Barcode reader
RFID reader
EFEM

Optional Configuration:
Wafer thickness <200 µm
Wafer warpage <±6 mm
OCR system

Standard Configuration:
Class 100
SEMI certified
Door sensors
Concentration sensors
Leak detection
Cleanroom grade


Optional Configuration:
Upgradable to Class 2
Hazardous gas sensor
SECS/GEM protocol

Experimental Results